ACES characterization of damping in micro-beam resonators

Damping Ratio in Micro-Beam Resonators Based on Magneto-Thermo-Elasticity

This paper investigates damping ratio in micro-beam resonators based on magneto-thermo-elasticity. A unique aspect of the present study is the effect of permanent magnetic field on the stiffness and thermo-elastic damping of the micro resonators. In our modeling the theory of thermo-elasticity with interacting of an externally applied permanent magnetic field is taken into account. Combined the...

Mathematical Modeling for Thermoelastic Double Porous Micro-Beam Resonators

In the present work, the mathematical model of a homogeneous, isotropic thermoelastic double porous micro-beam, based on the Euler-Bernoulli theory is developed in the context of Lord-Shulman [1] theory of thermoelasticity. Laplace transform technique has been used to obtain the expressions for lateral deflection, axial stress, axial displacement, volume fraction field and temperature distribut...

Effect of thermoelastic damping in nonlinear beam model of MEMS resonators by differential quadrature method

This paper presents a nonlinear model of a clamped-clamped microbeam actuated by an electrostatic load with stretching and thermoelastic effects. The frequency of free vibration is calculated by discretization based on the Differential Quadrature (DQ) Method. The frequency is a complex value due to the thermoelastic effect that dissipates energy. By separating the real and imaginary parts of fr...

Suppression of thermoelastic damping in MEMS beam resonators by piezoresistivity

Microelectronic mechanical (MEM) beam resonators with high quality factors are always preferred in practical applications. As one of the damping sources, thermoelastic damping (TED) caused by irreversible heat flows is usually considered as an upper limit of the overall damping effect. A new method is proposed in this work to compensate TED by taking advantage of the piezoresistive effect. Such...

Damping mechanisms in high-Q micro and nanomechanical string resonators